kw.\*:("Nanolayer growth stages")
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Monitoring the microstructure of nanosized palladium layers obtained via thermal and VUV stimulated MOCVDKUCHUMOV, B. M; KORETSKAYA, T. P; IGUMENOV, I. K et al.Surface & coatings technology. 2013, Vol 230, pp 266-272, issn 0257-8972, 7 p.Conference Paper